Summer nanofabrication workshop at ECE trains researchers on latest semiconductor processing techniques

Man with whit gloves in front of group of people, gesturing to the equipment behind him
Dr. Edward Xu, Facility Manager of the Toronto Nanofabrication Centre, leads workshop participants in a tour of the equipment in TNFC’s upgraded cleanrooms. The workshop took place at the end of June and trained academic researchers, members of industry and students in the latest techniques and methodologies in electron microscopy and semiconductor processing for nanomaterials and nanostructures. (photo by Madhi Varshini Ramesh)

JULY 22, 2024 • By Matthew Tierney

In June, members of the Toronto research community got up to speed up on the latest techniques and methodologies in electron microscopy and semiconductor processing. The Summer School for Advanced Fabrication and Characterization Techniques for Nanomaterials and Nanostructures, held on site at ECE, was hosted by the University of Toronto and McGill University through the Open Center for the Characterization of Advanced Materials (OCCAM) and the Toronto Nanofabrication Centre (TNFC).

The workshop drew over 50 participants from across the GTA, including academic researchers, members of industry and both graduate and undergraduate students. The three-day event saw talks from national and international experts, in-person demonstrations, and much sharing and networking among like-minded academic researchers and industry professionals.

A highlight among participants was the opportunity to reinforce the new concepts with hands-on experience with the cutting-edge equipment in TNFC’s upgraded cleanroom. Attendees were able to engage with the sputtering, e-beam lithography and etching techniques and see the resulting fabricated structures characterized with the electron microscopy equipment at TNFC.

“The enthusiasm that participants showed throughout reinforced to me how vital workshops like this are to the semiconductor community,” said ECE professor Wai Tung Ng, Faculty Director of TNFC. “I was happy to see that we could educate and inspire both novice users and those who are more experienced, who are looking for an edge for their products or research.”

Man before seated individuals, computer screens in background
Dr. Peter Brodersen of OCCAM explains surface characterization techniques in day three of the workshop. Workshop participants were given the opportunity for hands-on experience with the new techniques, fabricating structures with TNFC equipment. (photo by Madhi Varshini Ramesh)

At the end of the three-day workshop, all participants received a certification in Advanced Fabrication and Characterization Techniques for Nanomaterials and Nanostructures.

The workshop aligns with Ng’s vision of a Toronto-based fabrication hub, one that offers skills training along with expert advice and a place to connect.

“Even though it was a packed schedule, I saw how people made an effort to interact and come together over the three days,” said Ng. “You never know what great things a new connection or professional relationship will lead to. We will definitely be hosting more workshops in the future.”

TNFC is an interdisciplinary research and service centre that provides access to state-of-the-art nanofabrication facilities, collaborative research networks, advanced educational opportunities and information exchange events. Become a registered TNFC client today.