The Toronto Nanofabrication Centre (TNFC) is an interdisciplinary research and service centre at the University of Toronto.
The centre offers global research leadership by providing access to state-of-the-art nanofabrication facilities, collaborative research networks, advanced educational opportunities and information exchange events for registered users and clients.
TNFC facilities are not dedicated or restricted to any particular research group. Professional staff maintain the facilities, instruct and assist users, and provide nanofabrication services for clients. TNFC facilities are open to academic and industrial researchers, making the centre an ideal choice for open-access prototype development and testing.
Facilities
Pratt Microfabrication Facility
The Pratt Microfabrication Facility supports a wide range of silicon-based fabrication activities, including photolithography, oxidation, thin film deposition, plasma etching, wet etching, device processing, as well as packaging and analysis.
The 400m2 facility is located on the 4th floor of the Pratt engineering building at the University of Toronto. It includes a class 10,000 (ISO Class 7) microfabrication processing area and a class 1,000 (ISO Class 6) photolithography processing area.
Wallberg Nanolithography Facility
The Wallberg Nanolithography Facility houses the state-of-the-art Raith EBPG5000+ Electron Beam Lithography System. The 108 m2 facility is located in the basement of the Wallberg building at the University of Toronto.
To ensure exceptional performance, the system is enclosed in an environmental chamber maintaining temperature stability of 21 ± 0.25 ºC, 0.1 ºC/hr. The 58 m2 Class 100 cleanroom lab space comprises the environmental chamber, control room, processing lab, and gowning room. It also contains a complete suite of equipment for nanolithography, from CAD design to exposed resist development and analysis.
Key Research Areas
Microelectronics
Microfluidics
MEMS/NEMS
Photonics
Photovoltaics
Integrated Optics
Plasmonics
CMOS Processing
Nanomaterial Processing
Services
User Access
All users must complete an ECE User Access Form and attend mandatory training sessions before using TNFC facilities.
All new and existing non-ECE staff members and students must also fill out an Attestation Form. Both forms are to be completed and sent to tnfc@utoronto.ca.
Researchers will be charged for the use of the facilities on a per-minute basis as logged by our LMACS Access System, and invoices will be distributed on a quarterly basis.
For non-UofT academic and industrial researchers, please email tnfc@utoronto.ca to work out an arrangement to come onsite for a short-term visit.
Client Services
TNFC offers a wide range of fabrication and characterization services to academic and industrial clients. Many researchers require infrequent access to TNFC capabilities to prototype or analyze a small number of devices. For these cases, user access and training may not be practical. TNFC technical staff offer experienced service to perform fabrication and characterization processes on behalf of the user for a predetermined fee.
TNFC is also a proud member of the CMC FACT Network, which leverages experts and state-of-the-art toolsets from micro/nanofabrication laboratories at Canadian universities for custom fabrication and characterization services.
To request a service or for more information:
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Our Partners
Canadian Nanofabrication Facilities
Alberta NanoFab
Waterloo Quantum NanoFab Facility
McGill Nanotools Microfab
Western Nanofabrication Facility
4DLabs at Simon Fraser University
3IT of Sherbrooke
Contact Us
Faculty Director
Prof. Wai Tung Ng
Faculty Profile
Administrative Staff
Administrative Coordinator
Email: tnfc@utoronto.ca
Technical Staff
Edward Huaping Xu, Ph.D.
Facility Manager, Pratt Microfabrication Facility
Phone: 416 946-5350, Office: Pratt 482, Email: edwardlhuaping.xu@utoronto.ca
Yimin Zhou
Engineering Technologist
Phone: 416 946-8804, Office: Bahen 7292, Email: yimin.zhou@utoronto.ca
Mailing Address
Toronto Nanofabrication Centre
University of Toronto
Faculty of Applied Science & Engineering
10 King’s College Road
Sandford Fleming Building, Room B540
Toronto, Ontario
M5S 3G4